A Resonant Pressure Microsensor with a Wide Pressure Measurement Range
نویسندگان
چکیده
منابع مشابه
A Resonant Pressure Microsensor Capable of Self-Temperature Compensation
Resonant pressure microsensors are widely used in the fields of aerospace exploration and atmospheric pressure monitoring due to their advantages of quasi-digital output and long-term stability, which, however, requires the use of additional temperature sensors for temperature compensation. This paper presents a resonant pressure microsensor capable of self-temperature compensation without the ...
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The prmclple of measurmg pressure by means of a resonant diaphragm has been studled An oscillator conslstmg of an integrated amphfler with a plezoelectrlcally driven diaphragm m its feedback loop has been bullt The oscillator frequency 1s accurately proportional to the square of the pressure m the range 60 to 130 Torr The frequency range 1s 1324 to 1336 Hz (this range being limited by a spuriou...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2021
ISSN: 2072-666X
DOI: 10.3390/mi12040382